With the rapid development of semiconductor, flat panel display, light-emitting diode, photovoltaic, optical fiber and other high-tech industries, the demand for ultra-high-purity chemical supply system is increasing day by day. The functions of ultra-high-purity chemical system in semiconductors include: cleaning impurities and particles on the chip; etching chip pattern; developing chip pattern; chemical vapor deposition pre reactants; grinding chip; Cleaning process equipment parts, etc.
We provide customers with safe and reliable chemical conveying system with high degree of automation. When the process equipment needs liquid supply, the demand signal is given. The automatic liquid supply system receives the liquid demand signal, and the control program automatically opens the pump solenoid valve and pneumatic valve solenoid valve. The chemicals are transported out through the pump and supplied to the VMB branch valve box through the filtering device, and then to the process equipment. When the process equipment reaches the full state, the liquid demand information is closed, and the liquid supply system stops supplying. The system can automatically detect and collect data and information such as power system, transmission flow and pressure, leakage detection and so on. When the system detects a leak, it can cut off the supply and give an alarm to ensure personal safety.
We have a variety of advanced manufacturing process requirements of various media, from the source of safe and stable supply of process requirements to the process process still maintain the quality of the key technology, high-purity process media does not produce secondary pollution.
